Vacuum pump in high tech industry

Now in the vacuum profession, the oil-free vacuum pump with good cleanliness and high vacuum degree is paid more and more attention by various professions. In China, the development of this process is still in its infancy, and the demand for practice is constant.

For example, more than 70% of the vacuum industry in Japan is used in semiconductor and liquid crystal display (LCD) industries. The traditional vacuum system can not meet the requirements of cleaning, oil-free and corrosion resistance. Therefore, molecular pumps and cryogenic pumps in dry vacuum pumps in Japan are developing rapidly. At present, vacuum products have been updated, and many oil vacuum systems have been replaced by oil-free and clean vacuum systems.

From the proportion and trend of various types of vacuum pumps in China, it can be seen that the vast majority of vacuum industry in China is concentrated in the general traditional vacuum application, so the high vacuum system is still dominated by lax pumps, while the low vacuum and front stage vacuum are mainly rotary vane vacuum pumps and sliding valve pumps. The production of turbo molecular pumps is the smallest. Large or composite molecular pumps do not form batch production. As for low-temperature pumps and various types of dry vacuum pumps, they are just in the beginning, unable to meet the needs of semiconductor industry and LCD industry.
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